Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Electrical Sensors for Monitoring rf Plasma Sheaths

Published

Author(s)

Mark A. Sobolewski, James K. Olthoff
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE) Symp. on Microelectronic Processes, Sensors, and Controls
Conference Dates
September 27-29, 1993
Conference Location
Monterey, CA

Citation

Sobolewski, M. and Olthoff, J. (1994), Electrical Sensors for Monitoring rf Plasma Sheaths, Proc. Intl. Soc. for Optical Engineering (SPIE) Symp. on Microelectronic Processes, Sensors, and Controls, Monterey, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=432 (Accessed July 22, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 30, 1994, Updated October 12, 2021