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Electrical Sensors for Monitoring rf Plasma Sheaths

Published

Author(s)

Mark A. Sobolewski, James K. Olthoff
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE) Symp. on Microelectronic Processes, Sensors, and Controls
Conference Dates
September 27-29, 1993
Conference Location
Monterey, CA

Citation

Sobolewski, M. and Olthoff, J. (1994), Electrical Sensors for Monitoring rf Plasma Sheaths, Proc. Intl. Soc. for Optical Engineering (SPIE) Symp. on Microelectronic Processes, Sensors, and Controls, Monterey, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=432 (Accessed December 14, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 30, 1994, Updated October 12, 2021