Sobolewski, M.
and Olthoff, J.
(1994),
Electrical Sensors for Monitoring rf Plasma Sheaths, Proc. Intl. Soc. for Optical Engineering (SPIE) Symp. on Microelectronic Processes, Sensors, and Controls, Monterey, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=432
(Accessed April 16, 2024)
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Electrical Sensors for Monitoring rf Plasma Sheaths
Published
Author(s)
,
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE) Symp. on Microelectronic Processes, Sensors, and Controls
Conference Dates
September 27-29, 1993
Conference Location
Monterey, CA
Pub Type
Conferences
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Citation
Created April 30, 1994, Updated October 12, 2021