@conference{780966,
  author = {Mark Sobolewski and James Olthoff},
  title = {Electrical Sensors for Monitoring rf Plasma Sheaths},
  year = {1994},
  month = {1994-05-01 00:05:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE) Symp. on Microelectronic Processes, Sensors, and Controls, Monterey, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=432},
  language = {en},
}