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Measuring the Ion Current in Electrical Discharges using Radio-frequency Current and Voltage Measurements

Published

Author(s)

Mark A. Sobolewski
Citation
Applied Physics Letters
Volume
72

Citation

Sobolewski, M. (1998), Measuring the Ion Current in Electrical Discharges using Radio-frequency Current and Voltage Measurements, Applied Physics Letters (Accessed December 13, 2024)

Issues

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Created February 11, 1998, Updated February 19, 2017