Sobolewski, M.
, Olthoff, J.
and Wang, Y.
(1999),
Ion Energy Distributions and Sheath Voltages in Radio-Frequency-Biased, Inductively Coupled, High-Density Plasma Reactor, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=23723
(Accessed December 12, 2024)
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Ion Energy Distributions and Sheath Voltages in Radio-Frequency-Biased, Inductively Coupled, High-Density Plasma Reactor
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Journal of Applied Physics
Volume
85
Issue
8
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Journals
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Created March 31, 1999, Updated October 12, 2021