@article{781836,
  author = {Mark Sobolewski and James Olthoff and Yicheng Wang},
  title = {Ion Energy Distributions and Sheath Voltages in Radio-Frequency-Biased, Inductively Coupled, High-Density Plasma Reactor},
  year = {1999},
  number = {85},
  month = {1999-04-01 00:04:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=23723},
  language = {en},
}