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Dynamic Model of the RF-Powered Sheath in Highly Asymmetric RF Discharges

Published

Author(s)

Mark A. Sobolewski
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
56

Citation

Sobolewski, M. (1997), Dynamic Model of the RF-Powered Sheath in Highly Asymmetric RF Discharges, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) (Accessed April 22, 2024)
Created December 1, 1997, Updated February 17, 2017