TY  - JOUR
AU  - Mark Sobolewski
C2  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
DA  - 1997-12-01
LA  - en
M1  - 56
PB  - Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
PY  - 1997
TI  - Dynamic Model of the RF-Powered Sheath in Highly Asymmetric RF Discharges
ER  -