@article{147146,
  author = {Mark Sobolewski},
  title = {Dynamic Model of the RF-Powered Sheath in Highly Asymmetric RF Discharges},
  year = {1997},
  number = {56},
  month = {1997-12-01},
  publisher = {Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)},
  language = {en},
}