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Experimental Test of Models of Radio-Frequency Plasma Sheaths

Published

Author(s)

Mark A. Sobolewski
Citation
Applied Physics Letters
Volume
70

Citation

Sobolewski, M. (1997), Experimental Test of Models of Radio-Frequency Plasma Sheaths, Applied Physics Letters (Accessed March 1, 2024)
Created December 1, 1997, Updated February 17, 2017