Olthoff, J.
, Roberts, J.
, Van Brunt, R.
, Whetstone, J.
, Sobolewski, M.
and Djurovic, S.
(1992),
Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors, Proc. Intl. Soc. for Optical Engineering (SPIE) Technical Symposium on Microelectronic Processing Integration, San Jose, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=3907
(Accessed October 13, 2024)