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Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors

Published

Author(s)

James K. Olthoff, J R. Roberts, Richard J. Van Brunt, James Whetstone, Mark A. Sobolewski, S. Djurovic
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE) Technical Symposium on Microelectronic Processing Integration
Conference Dates
September 9-13, 1991
Conference Location
San Jose, CA

Citation

Olthoff, J. , Roberts, J. , Van Brunt, R. , Whetstone, J. , Sobolewski, M. and Djurovic, S. (1992), Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors, Proc. Intl. Soc. for Optical Engineering (SPIE) Technical Symposium on Microelectronic Processing Integration, San Jose, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=3907 (Accessed June 16, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 31, 1992, Updated October 12, 2021