@conference{757751,
  author = {James Olthoff and J Roberts and Richard Van Brunt and James Whetstone and Mark Sobolewski and S. Djurovic},
  title = {Mass Spectromic and Optical Emission Diagnostics for rf Plasma Reactors},
  year = {1992},
  month = {1992-02-01 00:02:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE) Technical Symposium on Microelectronic Processing Integration, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=3907},
  language = {en},
}