Spatial Uniformity in Chamber-Cleaning Plasmas Measured Using Planar Laser-Induced Fluorescence
Kristen L. Steffens, Mark A. Sobolewski
Planar laser-induced fluorescence (PLIF) measurements were made to determine 2-D spatial maps of CF2 density as an indicatior of chemical uniformity in 92% CF 4square root of O2 and 50% C2F6 square root of O2 chamber cleaning plasmas. Measurements were also made of broadband optical emission and of discharge current and voltage. All measurements were made in the Gaseous Electronics Conference (GEC)reference cell, a capacitively-coupled, parallel-plate platform designed to facilitate comparison of results among laboratories. The PLIF and emission results were found to correlate with discharge current and voltage measurements. Together, these optical and electrical measurements provide insight into the optimization of chamber-cleaning processes and areactors and suggest new methods of monitoring plasma uniformity.
January 1, 1998
Characterization and Metrology for ULSI Technology Conference
and Sobolewski, M.
Spatial Uniformity in Chamber-Cleaning Plasmas Measured Using Planar Laser-Induced Fluorescence, Characterization and Metrology for ULSI Technology Conference
(Accessed May 29, 2023)