TY - CONF AU - Kristen AU - Mark Sobolewski C2 - Characterization and Metrology for ULSI Technology Conference DA - 1998-01-01 LA - en PB - Characterization and Metrology for ULSI Technology Conference PY - 1998 TI - Spatial Uniformity in Chamber-Cleaning Plasmas Measured Using Planar Laser-Induced Fluorescence ER -