@conference{180251,
  author = {Kristen and Mark Sobolewski},
  title = {Spatial Uniformity in Chamber-Cleaning Plasmas Measured Using Planar Laser-Induced Fluorescence},
  year = {1998},
  month = {1998-01-01},
  publisher = {Characterization and Metrology for ULSI Technology Conference},
  language = {en},
}