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Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges

Published

Author(s)

James K. Olthoff, Richard J. Van Brunt, Mark A. Sobolewski
Proceedings Title
Proc. TenthInternational Conference on Gas Discharges and Their Applications
Conference Dates
September 13-18, 1992
Conference Location
Swansea, 1, UK

Citation

Olthoff, J. , Van Brunt, R. and Sobolewski, M. (1992), Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges, Proc. TenthInternational Conference on Gas Discharges and Their Applications, Swansea, 1, UK, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26700 (Accessed March 5, 2024)
Created August 31, 1992, Updated October 12, 2021