TY  - CONF
AU  - James Olthoff
AU  - Richard Van Brunt
AU  - Mark Sobolewski
C2  - Proc. TenthInternational Conference on Gas Discharges and Their Applications, Swansea, 1, UK
DA  - 1992-09-01 00:09:00
LA  - en
PB  - Proc. TenthInternational Conference on Gas Discharges and Their Applications, Swansea, 1, UK
PY  - 1992
TI  - Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26700
ER  -