@conference{759341,
  author = {James Olthoff and Richard Van Brunt and Mark Sobolewski},
  title = {Ion Kinetic-Energy Distributions and Electrical Measurements in AR/O2 rf Glow Discharges},
  year = {1992},
  month = {1992-09-01 00:09:00},
  publisher = {Proc. TenthInternational Conference on Gas Discharges and Their Applications, Swansea, 1, UK},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=26700},
  language = {en},
}