Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges

Published

Author(s)

J R. Roberts, James K. Olthoff, James Whetstone, Richard J. Van Brunt, Mark A. Sobolewski
Citation
Review of Scientific Instruments
Volume
65
Issue
1

Citation

Roberts, J. , Olthoff, J. , Whetstone, J. , Van Brunt, R. and Sobolewski, M. (1994), The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=13313 (Accessed June 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 1993, Updated October 12, 2021