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PUBLICATIONS

The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges

Published

Author(s)

J R. Roberts, James K. Olthoff, James Whetstone, Richard J. Van Brunt, Mark A. Sobolewski
Citation
Review of Scientific Instruments
Volume
65
Issue
1
Pub Type
Journals

Download Paper

Local Download
Electronics and Advanced communications

Citation

Roberts, J. , Olthoff, J. , Whetstone, J. , Van Brunt, R. and Sobolewski, M. (1994), The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges, Review of Scientific Instruments, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=13313 (Accessed October 6, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 1993, Updated October 12, 2021