@article{769391,
  author = {J Roberts and James Olthoff and James Whetstone and Richard Van Brunt and Mark Sobolewski},
  title = {The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges},
  year = {1994},
  number = {65},
  month = {1994-01-01 00:01:00},
  publisher = {Review of Scientific Instruments},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=13313},
  language = {en},
}