TY  - JOUR
AU  - J Roberts
AU  - James Olthoff
AU  - James Whetstone
AU  - Richard Van Brunt
AU  - Mark Sobolewski
C2  - Review of Scientific Instruments
DA  - 1994-01-01 00:01:00
LA  - en
M1  - 65
PB  - Review of Scientific Instruments
PY  - 1994
TI  - The Gaseous Electronics Conference Radio-frequency Reference Cell: A Defined Parallel-plate Radio-frequency System for Experimental and Theoretical Studies of Plasma-processing Discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=13313
ER  -