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Richard E. Cavicchi, Douglas C. Meier, Cary Presser, Suvajyoti S. Guha
Samples of suspended gold nanoparticles in the diameter range 10 nm to 100 nm were subjected to a single 7 ns pulse from a 532 nm laser to determine the effects of laser power on particle size distribution, mean size, and morphology. The experimental
Ravikiran Attota, Haesung Park, Victor H. Vartanian, Ndubuisi G. Orji, Richard A. Allen
Through-focus scanning optical microscopy (TSOM) transforms conventional optical microscopes into truly 3D metrology tools for nanoscale- to- microscale dimensional analysis with nanometer-scale sensitivity. Although not a resolution enhancement method
In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely be
Liya Yu, Richard J. Kasica, Robert D. Newby, Lei Chen, Vincent K. Luciani
This article demonstrates and evaluates photo/e-beam grayscale complementary lithography processes for the fabrication of large area, high topography grayscale structure. The combination of these two techniques capitalizes on the capability of
Ronald G. Dixson, Craig D. McGray, Boon Ping Ng, Ndubuisi G. Orji, Jon C. Geist
The National Institute of Standards and Technology (NIST) has been developing methods and standards to enable the traceable calibration of critical dimension atomic force microscopy (CD AFM). This technique involves flared tips and two-dimensional surface
Si nanocrystals, terminated with cyclohexane and allylamine, were analyzed using analytical ultracentrifugation (AUC), dynamic light scattering (DLS) and transmission electron microscopy (TEM). We found that AUC yielded equivalent particle size
Peter J. Lowell, Galen C. O'Neil, Jason M. Underwood, Joel N. Ullom
Nano- and Micro- Electromechanical devices (NEMS & MEMS) have become ubiquitous; examples include automobile accelerometers, inkjet printer heads, infrared viewers, and mirrors for image manipulation and projection. Applications fall broadly in the
John M. Pettibone, Julien C. Gigault, Vincent A. Hackley
A limiting factor in assessing the risk of current and emerging nanomaterials in biological and environmental systems is the ability to accurately detect and characterize their size, shape and composition in broad distributions and complex media
A new method for fabrication of high current density field emitters based on nanoporous silicon carbide is presented. The emitters are monolithic structures which do not require high temperature gas phase synthesis and the process is compatible with
Bryant C. Nelson, Donald H. Atha, John T. Elliott, Bryce J. Marquis, Elijah J. Petersen, Danielle Cleveland, Stephanie S. Watson, I-Hsiang Tseng, Andrew Dillon, Melissa Theodore, Joany Jackman
Well-characterized, nanoparticle reference materials are urgently needed for nanomaterial toxicity studies. The National Institute of Standards and Technology has developed three gold nanoparticle (AuNP) reference materials (10 nm, 30 nm, 60 nm) to address
Sujitra J. Pookpanratana, Joseph W. Robertson, Cherno Jaye, Daniel A. Fischer, Curt A. Richter, Christina A. Hacker
We have used Flip Chip Lamination (FCL) to form monolayer and bilayer molecular junctions of carboxylic acid-containing molecules with Cu atom incorporation. Carboxylic acid-terminated monolayers are self-assembled onto ultrasmooth Au using thiol chemistry
Ravikiran Attota, Victor Vertanian, Steve Olson, Robert Edgeworth, Iqbal Ali, Craig Huffman, Pate Moschak, Harry Lazier, Elizabeth Lorenzini
The exceptional z-height resolution of TSOM, as well as very fast measurement time, is particularly important for high volume manufacturing. These two attributes make TSOM advantageous for 3D-stacked IC measurements of TSV reveal structures, and C4 bumps
Sherrie R. Elzey, De-Hao D. Tsai, Lee L. Yu, Michael R. Winchester, Michael E. Kelley, Vincent A. Hackley
We report the development of a hyphenated instrument with the capacity to quantitatively characterize aqueous suspended gold nanoparticles (AuNPs) based on a combination of gas-phase size separation, particle counting, and elemental analysis. A customized
The purpose of this document is to provide guidance on the quantitative application of atomic force microscopy (AFM)to determine the size of nanoparticles2 deposited in dry form on flat substrates using height (z-displacement) measurement. Unlike electron
Preface Abstract: This is the preface of the book. No abstract is available. Introduction Abstract: The goal of this book is to show how control systems can be successfully applied to applications in micro- and nanosystems, to explore the wide variety of
Carbon nanotubes possess superior electrical and optical properties and hold great promise for electronic and biomedical applications1-10. The electronic properties of carbon nanotubes strongly depend on their chirality, with 1/3 being metallic1, 2/3 being
Aleksandr B. Stefaniak, Vincent A. Hackley, Gert Roebben, Kensei Ehara, Steve Hankin, Michael T. Postek, Iseult Lynch, Wei-En Fu, Thomas P. Linsinger, Andreas Th?nemann
There is a need to understand and manage potential risks posed to workers, the public, and the environment from exposure to engineered nanomaterials. In response, several organizations have developed lists of relevant nano-objects and of physico-chemical
Pavel Kabos, A Caprile, Coisson Marco, F Fiorillo, O M. Manu, E. S. Olivetti, M. A. Olariu, Pasquale Massimo, V. A. Scarlatache
Samples composed of a polymer matrix were loaded with different fractions from 0 to 30% of Fe oxide magnetic nanoparticles with an average size ranging from 50 to 25 nm. The permittivity and permeability of the composites were determined upon a very wide
Shmuel Barzilai, Francesca M. Tavazza, Lyle E. Levine
Gold nanowire chains are considered a good candidate for nanoelectronics devices since they exhibit remarkable structural and electrical properties. For practical engineering devices, -wurtzite BeO may be a useful platform for supporting these nanowires
Kristine A. Bertness, Norman A. Sanford, J. R. Montague, H.S. Park, Victor M. Bright, Charles T. Rogers
We have measured singly clamped cantilever mechanical-resonances in ensembles of as-grown gallium nitridenanowires (GaN NWs), from 12 K to 320 K. Resonance frequencies are approximately linearly dependent on temperature near 300 K with relative shifts of
Evaluation of aggregation and agglomeration of carbon nanotube (CNT) solution has been one of the key issues for applications. Here we introduce a simple method based on depolarized dynamic light scattering (DDLS) performed at multiple scattering angles to
John D. Wason, John T. Wen, Jason J. Gorman, Nicholas Dagalakis
This paper describes the algorithm development and experimental results of a vision-guided multi-probe microassembly system. The key focus is to develop the capabilities required for the construction of three dimensional (3D) structures using only planar
The current status of experimental approaches to analyze the spin wave dynamics in ferromagnetic nanoscale structures is reviewed. Recent developments in frequency- and field swept spectroscopy to determine the resonant response of nanoscale ferromagnets