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Standard Guide for Size Measurement of Nanoparticles Using Atomic Force Microscopy



Vincent A. Hackley, Frank W. DelRio


The purpose of this document is to provide guidance on the quantitative application of atomic force microscopy (AFM)to determine the size of nanoparticles2 deposited in dry form on flat substrates using height (z-displacement) measurement. Unlike electron microscopy, which provides a two-dimensional projection or a two-dimensional image of a sample, AFM provides a three-dimensional surface profile. While the lateral dimensions are influenced by the shape of the probe, displacement measurements can provide the height of nanoparticles with a high degree of accuracy and precision. If the particles are assumed to be spherical, the height measurement corresponds to the diameter of the particle. In this guide, procedures are described for dispersing gold nanoparticles on various surfaces such that they are suitable for imaging and height measurement via intermittent contact mode AFM. Generic procedures for AFM calibration and operation to make such measurements are then discussed. Finally, procedures for data analysis and reporting are addressed. The nanoparticles used to exemplify these procedures are National Institute of Standards and Technology (NIST) reference materials containing citratestabilized negatively charged gold nanoparticles in an aqueous solution.
Documentary Standard


atomic force microscopy, nanoparticle, nanotechnology, ASTM, standard


Hackley, V. and DelRio, F. (2013), Standard Guide for Size Measurement of Nanoparticles Using Atomic Force Microscopy, Documentary Standard, [online], (Accessed April 15, 2024)
Created January 1, 2013, Updated November 10, 2018