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Theodore V. Vorburger, Christopher J. Evans, William T. Estler
Traceable optics metrology is not an expensive overhead. Rather it can improve NASA''s procurement process and eliminate costly Hubble-like mistakes. In deciding if a part meets specification, ISO Standard 14253, Part 1 requires that the vendor must
Donald McClure, Robert Cayse, David R. Black, Steven Goodrich, K Lagerloef, D Peter, Daniel C. Harris, Dale McCullum, Daniel H. Platus, Charles E. Patty, Robert S. Polvani
The Sapphire Statistical Characterization and Risk Reduction Program tested 1400 4-point flexure bars with different crystal orientations at different temperatures to establish a mechanical strength database for engineering design. Sapphire coupons were
Bradley N. Damazo, Andras Vladar, Alice V. Ling, M A. Donmez, Michael T. Postek, Crossley E. Jayewardene
This paper describes the design and implementation of a system for monitoring the performance of a critical dimension measurement scanning electron microscope (CD-SEM). Experiments were performed for tests involving diagnosis of the vacuum system and
Z Berenyi, N Stolterfoht, E Takacs, J Pedulla, R Deslattes, J Gillaspy, R Minniti, L Ratliff
We have studied the spectrum of x-rays emitted when 130 and 200 keV kinetic energy hydrogen-like argon ions impact silicon dioxide surfaces. Specifically, we were interested in the mechanism for creation of K-shell holes in the silicon target atoms, which
David B. Newell, Jon R. Pratt, John A. Kramar, Douglas T. Smith, L Feeney, Edwin R. Williams
Although nanonewton force measurements are commonplace in industry, no National Measurement Institute supports a link to the International System of Units (SI) below one newton. The National Institute of Standards and Technology has launched a five-year
Surface finish is important to the function of a wide range of industrial components including highways, ship hulls and propellers, mechanical parts, semiconductors, and optics. Hence, many documentary standards have been developed for specifying surface
We describe a laser system for very high-accuracy dimensional metrology. A sealed-cavity helium-neon laser is offset-locked to an iodine-stabilized laser in order to realize a secondary standard with higher power and less phase noise. Synchronous averaging
T Leung, M Gerstenberg, D J. Lavrich, G Scoles, F Schreiber, G Poirier
Monolayers of 1,6-hexanedithiol [HS(CH 2) 6SH] deposited on Au(111) from the gas phase were characterized by scanning tunneling microscopy (STM), grazing incidence X-ray diffraction (GIXD), and low energy atom diffraction (LEAD). Molecular resolution STM
Ali L. Eichenberger, Mark W. Keller, John M. Martinis, Neil M. Zimmerman
A new type of capacitance standrd based on counting electrons has been built. The operation of the standrd has already given very promising results for the determination of the value of a cryogenic vacuum-gap capacitor. The new capacitance standard
Harold Sanchez, J. Cioffi, H. Laiz, D. Bennett, H. Ferreira, R. Ortega, Nile M. Oldham, Mark E. Parker
An international comparison of dc and low-frequency electrical units conducted between 19 laboratories in 16 countries in the Americas is described. The comparison was conducted between 1997 and 1999 and sponsored by the Interamerican Metrology System and
This work documents the first part of a two-part study about the application of nano-tips to critical dimension (CD) scanning electron microscopes used in integrated circuit production. Nano-tips, by comparison to all conventional cold, thermally assisted
A Kalukin, B Winn, Yong Wang, C Jacobsen, Z Levine, Joseph Fu
For two-dimensional x-ray imaging of thin films, the technique of scanning transmission x-ray microscopy (STXM) has achieved images with feature sizes as small as 40 nm in recent years. However, calibration of three-dimensional tomographic images that are
Jun-Feng Song, Theodore V. Vorburger, Alim A. Fatah
In April 1998, two prototype standard bullets were developed at the National Institute of Standards and Technology (NIST). In October 1999, prototype standard casings were also developed at NIST. The standard bullets and casings are intended for use in
To enable nationwide and worldwide ballistics measurement traceability and unification, the National Institute of Standards and Technology (NIST) developed standard bullets and casings. This report details the creation and testing of these prototypes which
Tunneling transistors designed with a lateral tunnel barrier between source and drain electrodes have attracted much attention recently as an approach to silicon-compatible nanoelectronics (1). In order to realize this device, the lateral tunneling barrier
Tunneling transistors designed with a lateral tunnel barrier between source and drain electrodes have attracted much attention recently as an approach to silicon-compatible nanoelectronics. In order to realize this device, the lateral tunneling barrier
Theodore V. Vorburger, Jun-Feng Song, Joseph Fu, M Tundermann, Thomas Brian Renegar, Theodore D. Doiron, N G. Orji
Decreasing sizes and tolerances of engineering components bring a demand for decreasing uncertainty in the dimensional measurements of these parts. Hence there is increasing need for measuring machines capable of performing dimensional and geometrical
The influences of form errors on hardness performance of Rockwell diamond indenter are discussed. Experimental results are introduced. The Finite Element Analysis (FEA) method is used to simulate the hardness measurement process. The effect of tip radii
A Deleporte, J Allgair, C Archie, G Banke, Michael T. Postek, J Schlesinger, Andras Vladar, A Yanof
The Advanced Metrology Advisory Group (AMAG) comprised of representatives from International SEMATECH consortium member companies and the National Institute of Standards and Technology have joined to develop a new unified specification for an advanced
Joseph R. Kinard Jr., Thomas E. Lipe Jr., Clifton B. Childers, Owen B. Laug, Jon R. Pratt
NIST is now offering broadband, ac-dc difference calibrations of current shunts from 3 A to 100 A, and at frequencies up to 30 kHz, as special tests. We present an overview of this new service including the design and construction of the NIST standard