Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Molecular Measuring Machine Design and Performance



John A. Kramar, Jay S. Jun, William B. Penzes, Vincent P. Scheuerman, Fredric Scire, E C. Teague


We have developed a metrology instrument called the Molecular Measuring Machine (M3) with the goal of performing two-dimensional point-to-point measurements with nanometer-level uncertainties over a 50 mm by 50 mm area. The scanning tunneling microscope probe and the Michelson interferometer metric both have sub-nanometer resolution. M3 operates in a vacuum of 10<sup>-5</sup> Pa and at a temperature of 20 ? 0.005?C. We have measured the pitch of a one-dimensional grating produced by laser-focused atomic deposition of Cr. The average line pitch was 212.69 nm, with an estimated standard uncertainty of 5 pm, compared with a predicted value of 212.78 ? 0.01 nm. Measurements were also made of the surface lattice parameters of the organic conductor (TEET)[Ni(dmit)2]2. Initial small-area measurements were in agreement with the x-ray-crystallography-measured lattice constants of 1.02 nm and 0.75 nm to within 70 pm.
Proceedings Title
Proceedings of the American Society for Precision Engineering
Conference Dates
November 1, 2001
Conference Location
Arlington, VA
Conference Title
American Society for Precision Engineering


atom-based standards, dimensional metrology, Michelson interferometry, scanning tunneling microscopy


Kramar, J. , Jun, J. , Penzes, W. , Scheuerman, V. , Scire, F. and Teague, E. (2001), Molecular Measuring Machine Design and Performance, Proceedings of the American Society for Precision Engineering, Arlington, VA (Accessed June 18, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created January 1, 2001, Updated February 19, 2017