TY  - CONF
AU  - John Kramar
AU  - Jay Jun
AU  - William Penzes
AU  - Vincent Scheuerman
AU  - Fredric Scire
AU  - E Teague
C2  - Proceedings of the American Society for Precision Engineering, Arlington, VA
DA  - 2001-01-01
LA  - en
M1  - 25
PB  - Proceedings of the American Society for Precision Engineering, Arlington, VA
PY  - 2001
TI  - Molecular Measuring Machine Design and Performance
ER  -