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Conferences

Component Segregation in Model Chemically Amplified Resists

March 15, 2007

Author(s)

John T. Woodward IV, Theodore Fedynyshyn, David Astolfi, Susan Cann, Michael Leeson

We have applied chemical force microscopy (CFM) to probe the chemical segregation of resist materials. CFM is capable of providing simultaneous information...

Segmentation and Classification of Human Forms Using LADAR Data

March 14, 2007

Author(s)

James S. Albus, Tsai Hong Hong, Tommy Chang

High resolution LADAR images of scenes containing human forms have been segmented and algorithms developed for recognizing human forms in various positions in...

A new model of pulse oximetry: Two-dimensional pulsation

March 14, 2007

Author(s)

Shao Yang, Paul B. Batchelder, Dena M. Raley

We developed a two-dimensional pulsation model of pulse oximetry. Instead of a one-dimensional single layer as in the conventional theory, the arteries pulsate...

Reliability and Characterization Challenges for Nano-Scale Electronic Devices

March 14, 2007

Author(s)

John S. Suehle, Hao Xiong, Moshe Gurfinkel

Scaling electronic devices to nano-scale dimensions may introduce unforeseen physical mechanisms that may seriously compromise device reliability. It has been...

Sensor Location through Linear Programming with Arrival Angle Constraints

March 14, 2007

Author(s)

Camillo Gentile, J Shiu

In previous work, we established a linear programming framework to determine sensor location from measured link distances between neighboring nodes in a network...

Chip scale atomic devices

March 13, 2007

Author(s)

Svenja A. Knappe, P Schwindt, Vladislav Gerginov, V Shah, Alan Brannon, Brad Lindseth, Li-Anne Liew, Hugh Robinson, John Moreland, Z Popovic, Leo W. Hollberg, John E. Kitching

We give an overview over our research on chip-scale atomic devices. By miniaturizing optical setups based on precision spectroscopy, we develop small atomic...

Design of a Real-time Spindle Health Monitoring and Diagnosis System Based on Open Systems Architecture

March 13, 2007

Author(s)

Li Zhang, Ruqiang Yan, Robert Gao, Kang B. Lee

Accurate identification of spindle health in real time is an important feature of next generation smart machining systems that are capable of self-diagnosis...

On-Chip Characterization of Molecular Electronic Devices using CMOS: The Design and Simulation of a Hybrid Circuit Based on Experimental Molecular Electronic Device Results

March 11, 2007

Author(s)

Nadine Gergel-Hackett, Garrett S. Rose, Pater Paliwoda, Christina Hacker, Curt A. Richter

The focus of the field of molecular electronics in recent years has been mostly limited to the development of molecular electronic test devices and the...

Need for Standardization of EBSD Measurements for Microstructural Characterization of Thin Film Structures

March 5, 2007

Author(s)

Roy H. Geiss, David T. Read

Microstructural characterization of metal thin films includes measurement of grain size, crystallographic texture and misorientation angle across grain...

Process Monitoring of Turning and Model Adaptation for Smart Machining Systems

March 1, 2007

Author(s)

Jarred C. Heigel, Robert W. Ivester

Smart Machining Systems improve manufacturing efficiency using optimization based on process models. Cutting force models developed from a narrow set of...

Zero-Order Imaging of Device-Sized Overlay Targets Using Scatterfield Microscopy

March 1, 2007

Author(s)

Bryan M. Barnes, Lowell P. Howard, P Lipscomb, Richard M. Silver

Patterns of lines and trenches with nominal linewidths of 50 nm have been proposed for use as an overlay target appropriate for placement inside the patterned...

Monte Carlo Modeling of Secondary Electron Imaging in Three Dimensions

March 1, 2007

Author(s)

John S. Villarrubia, Nicholas W. Ritchie, J R. Lowney

The Coming of Age of Tilt CD-SEM

March 1, 2007

Author(s)

B Bunday, J Allgair, E Solecky, C Archie, Ndubuisi George Orji

The need for 3D metrology is becoming more urgent to address critical gaps in metrology for both lithographic and etch processes. Current generation...

Application of Carbon Nanotube Probes in a Critical Dimension Atomic Force Microscope

March 1, 2007

Author(s)

B C. Park, J Choi, S J. Ahn, D H. Kim, L Joon, Ronald G. Dixson, Ndubuisi George Orji, Joseph Fu, Theodore V. Vorburger

The ever decreasing size of semiconductor features demands the advancement of critical dimension atomic force microscope (CD-AFM) technology, for which the...

Development of an Experimental Database and Kinetic Models for Surrogate Jet Fuels

March 1, 2007

Author(s)

M Colket, T Edwards, S Williams, N Cernansky, D L. Miller, Fokion N. Egolfopoulos, P Linstedt, Ram Seshadri, F L. Dryer, C K. Law, Daniel G. Friend, David Lenhert, Heinz Pitsch, A Sarofim, M Smooke, Wing Tsang

The engineering and scientific community ha been searching for the identification of surrogate fuels that can reasonably represent the performance and emissions...

Boundary/Contour Fitted Grid Generation for Effective Visualizations in a Digital Library of Mathematical Functions

March 1, 2007

Author(s)

Bonita V. Saunders, Qiming Wang

Effective visualizations can help researchers obtain a more complete understanding of high level mathematical functions that arise in mathematics, statistics...

Development of an Evaluation Method for Acceptable Usability

February 27, 2007

Author(s)

Brian C. Stanton, Brian Antonishek, Jean C. Scholtz

The National Institute of Standards and Technology (NIST) conducted three workshops with First Responders to determine requirements for robots used in Urban...

Enhancement of Engine Oil Wear and Friction Control Performance Through Titanium Additive Chemistry

February 27, 2007

Author(s)

J M. Guevremont, G H. Guinther, D Szemenyei, Mark Devlin, T-C Jao, Cherno Jaye, Joseph Woicik, Daniel A. Fischer

Traditionally, wear protection and friction modification by engine oil are provided by zinc dithiophosphate (ZDDP) or other phosphorus compounds. These...

Accuracy in Optical Image Modeling

February 26, 2007

Author(s)

James E. Potzick, Egon Marx, M P. Davidson

Wafer exposure process simulation and optical photomask feature metrology both rely on optical image modeling for accurate results. The best way to gauge the...

Standards Development for Wireless Communications for Urban Search and Rescue Robots

February 26, 2007

Author(s)

Kate Remley, Galen H. Koepke, Elena R. Messina, Adam S. Jacoff, George Hough

To gather data in support of standards development for urban search and rescue robots, NIST is conducting a series of field tests to quantify the functionality...

FTIR measurements of compositional heterogeneities

February 25, 2007

Author(s)

Shuhui Kang, B D. Vogt, Wen-Li Wu, Vivek Prabhu, David L. VanderHart, Ashwin Rao, Eric K. Lin, Karen Turnquest

A general approach to characterize compositional heterogeneity in polymer thin films using Fourier transform infrared (FTIR) spectroscopy has been demonstrated...

Identifying Materials Limits of Chemically Amplified Photoresists

February 25, 2007

Author(s)

Wen-Li Wu, Vivek Prabhu, Eric K. Lin

Chemically amplified photoresists are likely to remain the primary imaging materials for the semiconductor industry. As feature sizes decrease to dimensions...

Effect of Photoacid Generator Concentration and Developer Strength on the Patterning Capabilities of a Model EUV Photoresist

February 25, 2007

Author(s)

Kwang-Woo Choi, Vivek Prabhu, Kristopher Lavery, Eric K. Lin, Wen-Li Wu, John T. Woodward IV, Michael Leeson, H Cao, Manish Chandhok, George Thompson

Current extreme ultraviolet (EUV) photoresist materials do not yet meet requirements on exposure-dose sensitivity, line-width roughness (LWR), and resolution...

Long-Term Stability Test System for High-Voltage, High-Frequency SiC Power Devices

February 25, 2007

Author(s)

Tam H. Duong, David Berning, Allen R. Hefner Jr., Keyue M. Smedley

This paper presents test system developed for long-term stability characterization of 10 kV Silicon Carbide (SiC) power MOSFETs and SiC diodes under 20 kHz hard...

Evaluation of the 3D Compositional Fluctuation Effect on Line-Edge-Roughness

February 25, 2007

Author(s)

Shuhui Kang, Wen-Li Wu, B D. Vogt, Vivek Prabhu, Eric K. Lin, Karen Turnquest

Line-edge-roughness (LER) and the relationship to resist processing and materials design is a critical problem for sub-65 nm photolithography. In this work we...

Does Habituation Affect Fingerprint Quality?

February 20, 2007

Author(s)

Mary F. Theofanos, R J. Michaels, Jean C. Scholtz, Emile L. Morse, Peter May

Interest in the environmental factors that affect biometric image quality is increasing as biometric technologies are currently being implemented in various...

Accurate color measurement methods for medical displays

February 15, 2007

Author(s)

Anindita Saha, Hongye Liang, Aldo Badano, Edward F. Kelley

We report on the characterization of two novel probes for measuring display color without contamination from other screen areas or off-normal emissions. The...

Maturation Stage Dependent Interaction of Mature Osteoblasts and Osteoprogenitor Cells with Microvascular Endothelial Cells

February 14, 2007

Author(s)

Erica Takai, Rocky Tuan, Steven D. Hudson

Angiogenesis is essential to the development, maintenance, and repair of bone tissue, as well as the survival of engineered tissues. Also, since osteoblasts (OB...

Osteocyte Enhancement of Angiogenesis In Vitro

February 14, 2007

Author(s)

Erica Takai, Juan M. Taboas, Rocky Tuan, Steven D. Hudson

It is well known that an intimate relationship exists between vascularization and bone formation during development and fracture healing, where new bone...

The use of thermo-electric cooled short-wave infrared detectors in heat-seeking systems

February 14, 2007

Author(s)

Howard W. Yoon, George P. Eppeldauer

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