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Synchrotron Ultraviolet Radiation Facility SURF III

Synchrotron Ultraviolet Radiation Facility SURF III

The Synchrotron Ultraviolet Radiation Facility SURF III is operated by the Optical Radiation Group as a stable light source for radiometry and research. SURF covers the wavelength range from the far infrared to the soft x-ray.

  • Provides our National standards for UV and EUV radiometry
    • Monitoring space weather and solar variability
    • Advancing industrial uses – e.g. EUV microlithography, UV curing
  • Provides continuum radiation from the soft x-ray to the infrared spectral regions, with ideal output for EUV studies related to solar physics and the development of EUV lithography
  • Calculable irradiance traceable to the SI units to less than 1 % absolute uncertainty from 4 nm to 400 nm
  • Beamlines equipped for detector, spectrometer, and lamp calibrations; reflectometry and transmission measurements; degradation and lifetime studies
  • Carefully characterized and maintained source, operated in a clean hydrocarbon-free vacuum
General SURF Program InquiriesEdward Hagley
SURF Accelerator SystemsEdward Hagley
Synchrotron Radiation ApplicationsUwe Arp
Extreme-ultraviolet ProgramSteven Grantham
Beamline 1Extreme-ultraviolet multilayer degradation studies
Properties of extreme-ultraviolet photoresists
Steven Grantham, Stephanie Moffitt
Beamline 2Absolute source-based irradiance calibrations of radiometric instrumentation
Ultraviolet lamp calibrations
Rob Vest, Uwe Arp
Beamline 3Ultraviolet and extreme-ultraviolet optical properties and calibrationsRob Vest, Uwe ArpStephanie Moffitt
Beamline 4Ultraviolet optical properties and calibrationsUwe Arp, Rob Vest
Beamline 5New Beam Imaging SystemUwe Arp
Beamline 6Current monitorEdward Hagley, Alex Farrell
Beamline 6BEducational DisplayCharles Clark
Beamline 7Extreme-ultraviolet optical properties and calibrationsSteven Grantham
Beamline 8Extreme-ultraviolet multilayer endurance testingStephanie Moffitt
Created May 15, 2009, Updated May 7, 2024