Tarrio, C.
, Grantham, S.
, Vest, R.
, Germer, T.
, Barnes, B.
, Moffitt, S.
, Simonds, B.
and Spidell, M.
(2023),
NIST efforts in extreme-ultraviolet metrology, Proceedings of the SPIE, [online], https://doi.org/10.1117/12.2686832, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956924
(Accessed October 7, 2024)