TY - VIDEO AU - Tarrio, Charles S. AU - Grantham, Steven AU - Vest, Rob AU - Germer, Thomas A. AU - Barnes, Bryan AU - Moffitt, Stephanie AU - Simonds, Brian AU - Spidell, Matthew C2 - Proceedings of the SPIE DA - 2023-11-21 05:11:00 DO - https://doi.org/10.1117/12.2686832 LA - en PB - Proceedings of the SPIE PY - 2023 TI - NIST efforts in extreme-ultraviolet metrology UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956924 ER -