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Steven Grantham (Fed)
Steve Grantham received his Optical Science and Engineering Ph.D. from the University of Central Florida's Center for Research and Education in Optics and Lasers (CREOL). His graduate research involved the study and application of short pulse laser produced plasmas. He has been a beamline scientist at NIST’s SURF III since 1999. He is currently working on the NIST’s EUV reflectometry, radiometry, and scatterometry projects at SURF III.
Links
- SURF III
- EUV reflectometry (Beamline 7)
- Metrology for EUVL
- Beamline 1: Degradation of EUV filters and mirrors
Research InterestS
- EUV reflectometry
- EUV radiometry
- Laser-matter interactions
- Additive manufacturing
Awards
- PML Excellence in Cooperation, Collaboration and Teamwork Award 2023
- Department of Commerce Bronze Medal 2023
- PML Excellence in Safety Award 2022
- NASA Robert H. Goddard Award 2021
- Department of Commerce Gold Medal 2021
- NASA Certificate of Recognition 2019
- NIST Colleagues’ Choice Award 2015
- Department of Commerce Silver Medal, 2013
- William P. Slichter Award, 2007
- Department of Commerce Silver Medal, 2004