Steven Grantham

Steve Grantham received his Ph.D. from the University of Central Florida's Center for Research and Education in Optics and Lasers (CREOL). His graduate research involved the study and application of short pulse laser produced plasmas. He is currently in a lead role of the Physical Measurement Laboratory’s team for development of the Additive Manufacturing Metrology Testbed (AMMT) and the Temperature and Emittance of Melts, Powders and Solids (TEMPS) system.

Research InterestS

Laser-matter interactions
Additive manufacturing
Emittance and temperature measurement
EUV reflectometry
EUV radiometry

Awards

NIST Colleagues’ Choice Award 2015
Department of Commerce Silver Medal, 2013
William P. Slichter Award, 2007
Department of Commerce Silver Medal, 2004

Selected Publications

A Novel Wafer-plane Dosimeter for EUV Lithography

November 1, 2009

Author(s)

Steven E. Grantham, Charles S. Tarrio

Extreme Ultraviolet Lithography (EUVL) incorporates 13.5 nm light for patterning wafers and requires in-situ wafer-plane dosimetry that can be tailored to the

EUVL dosimetry at NIST

March 13, 2009

Author(s)

Charles S. Tarrio, Steven E. Grantham, Marc J. Cangemi, Robert E. Vest, Thomas B. Lucatorto, Noreen Harned

As part of its role in providing radiometric standards in support of industry, NIST has been active in advancing extreme ultraviolet dosimetry on various fronts

Design considerations for a cascaded grating interferometer suitable for EUV interference lithography

April 10, 2009

Author(s)

Zachary H. Levine, Thomas B. Lucatorto, Steven E. Grantham

The potential of a cascaded grating interferometer to perform Extreme Ultraviolet Interference Lithography (EUV-IL) depends on its beng coupled to a source that

Publications

Laser Calibration for Powder Bed Fusion Additive Manufacturing Process

July 27, 2022

Author(s)

Ho Yeung, Steven Grantham

Laser powder bed fusion systems use a high-power laser, steered by two galvanometer mirrors to scan a pattern on metal powder layers. The laser spot size

NIST Traveling Tunable Laser Projector (TTLP) for UV-Blue Disinfection Dose Determinations

June 21, 2022

Author(s)

Thomas C. Larason, Steven Grantham, Clarence Zarobila, Yuqin Zong, C Cameron Miller, Michael Schuit, Brian Holland, Stewart Wood, Melissa Krause

As COVID-19 was overtaking the world in the spring of 2020, the National Institute of Standards and Technology began collaborating with the National Biodefense

The Irradiance Instrument Subsystem (IRIS) on the Airborne-Lunar Spectral Irradiance (Air-LUSI) Instrument

March 23, 2022

Author(s)

Steven Grantham, Thomas C. Larason, Clarence Zarobila, Stephen Maxwell, John Woodward, Kevin Turpie, S. Andrew Gadsden

The objective of the airborne LUnar Spectral Irradiance (air-LUSI) project is to make low uncertainty, SI-traceable measurements of the lunar spectral

Measurement Uncertainty of Surface Temperature Distributions for Laser Powder Bed Fusion Processes

August 10, 2021

Author(s)

David Deisenroth, Sergey Mekhontsev, Brandon Lane, Leonard M. Hanssen, Ivan Zhirnov, Vladimir Khromchenko, Steven Grantham, Daniel Cardenas-Garcia, Alkan Donmez

This paper describes advances in measuring the characteristic spatial distribution of surface temperature and emissivity during laser-metal interaction under

Optical and Mechanical Design of a Telescope for Lunar Spectral Irradiance Measurements from a High-Altitude Aircraft

September 8, 2020

Author(s)

Clarence Zarobila, Steven Grantham, Steven W. Brown, John T. Woodward IV, Stephen Maxwell, Dana R. Defibaugh, Thomas C. Larason, Kevin Turpie

We have designed a non-imaging telescope for measurement of the spectral irradiance of the moon. The telescope was integrated into a wing pod of a NASA ER-2

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Steven Grantham (Fed)

Research InterestS

Awards

Selected Publications

Publications