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Search Publications by: Richard A. Allen (Fed)

Displaying 126 - 136 of 136

An Electrical Test Structure for Improved Measurement of Feature Placement and Overlay in Integrated Circuit Fabrication Processes

December 31, 1993

Author(s)

Richard A. Allen, C. E. Schuster

Test Structure for the In-Plane Locations of Projected Features with Nanometer-Level Accuracy Traceable to a Coordinate Measurement System

December 31, 1993

Author(s)

Michael W. Cresswell, Richard A. Allen, C. H. Linholm, Colleen E. Hood, William B. Penzes, E C. Teague

Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies

September 1, 1993

Author(s)

Richard A. Allen, P. Troccolo, James C. OwenI II, James E. Potzick, Michael T. Postek, Loren W. Linholm

Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology

December 31, 1992

Author(s)

Richard A. Allen, Michael W. Cresswell

Voltage-Dividing Potentiometer Enhancements for High-Precision Feature Placement Metrology

December 31, 1992

Author(s)

Richard A. Allen, Michael W. Cresswell, Colleen E. Hood, Loren W. Linholm

A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps

June 1, 1992

Author(s)

Richard A. Allen, Michael W. Cresswell, Laurence M. Buck

A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances

December 31, 1991

Author(s)

Michael W. Cresswell, Michael Gaitan, Richard A. Allen, Loren W. Linholm

Extending Electrical Measurements to the 0.5-um Regime

December 31, 1991

Author(s)

P. Troccolo, L. Mantalas, Richard A. Allen, Loren W. Linholm

Knowledge Verification of Machine-Learning Procedures Based on Test Structure Measurements

December 31, 1991

Author(s)

D. Khera, Loren W. Linholm, Richard A. Allen, Michael W. Cresswell, V. C. Tyree, W. Hansford, C. Pina

Test Chip for the Evaluation of Surface Diffusion Phenomena in Sputtered Aluminum Planarization Processes

December 31, 1991

Author(s)

M. A. Jones, John W. Roberts, Colleen E. Hood, Michael W. Cresswell, Richard A. Allen

CMOS Process Monitor

December 31, 1988

Author(s)

M. G. Buehler, Loren W. Linholm, V. C. Tyree, Richard A. Allen, B. R. Blaes, K. A. Hicks, G. A. Jennings

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