Troccolo, P.
, Mantalas, L.
, Allen, R.
and Linholm, L.
(1991),
Extending Electrical Measurements to the 0.5-um Regime, Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA
(Accessed April 24, 2024)
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Extending Electrical Measurements to the 0.5-um Regime
Published
Author(s)
P. Troccolo, L. Mantalas, ,
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control V
Volume
1464
Conference Dates
March 4-5, 1991
Conference Location
San Jose, CA, USA
Pub Type
Conferences
Citation
Created December 30, 1991, Updated October 12, 2021