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Extending Electrical Measurements to the 0.5-um Regime

Published

Author(s)

P. Troccolo, L. Mantalas, Richard A. Allen, Loren W. Linholm
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control V
Volume
1464
Conference Dates
March 4-5, 1991
Conference Location
San Jose, CA, USA

Citation

Troccolo, P. , Mantalas, L. , Allen, R. and Linholm, L. (1991), Extending Electrical Measurements to the 0.5-um Regime, Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA (Accessed April 14, 2024)
Created December 30, 1991, Updated October 12, 2021