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Extending Electrical Measurements to the 0.5-um Regime
Published
Author(s)
P. Troccolo, L. Mantalas, Richard A. Allen, Loren W. Linholm
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control V
Volume
1464
Conference Dates
March 4-5, 1991
Conference Location
San Jose, CA, USA
Pub Type
Conferences
Citation
Troccolo, P.
, Mantalas, L.
, Allen, R.
and Linholm, L.
(1991),
Extending Electrical Measurements to the 0.5-um Regime, Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA
(Accessed October 12, 2025)