@conference{753796, author = {P. Troccolo and L. Mantalas and Richard Allen and Loren Linholm}, title = {Extending Electrical Measurements to the 0.5-um Regime}, year = {1991}, number = {1464}, month = {1991-12-31 00:12:00}, publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA}, language = {en}, }