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PUBLICATIONS

A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances

Published

Author(s)

Michael W. Cresswell, Michael Gaitan, Richard A. Allen, Loren W. Linholm
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Volume
4
Conference Dates
March 18-20, 1991
Conference Location
Kyoto, 1, JA
Pub Type
Conferences

Citation

Cresswell, M. , Gaitan, M. , Allen, R. and Linholm, L. (1991), A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances, Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA (Accessed October 12, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1991, Updated October 12, 2021
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