Cresswell, M.
, Gaitan, M.
, Allen, R.
and Linholm, L.
(1991),
A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances, Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA
(Accessed June 23, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances
Published
Author(s)
, , ,
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Volume
4
Conference Dates
March 18-20, 1991
Conference Location
Kyoto, 1, JA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created December 30, 1991, Updated October 12, 2021