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A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances

Published

Author(s)

Michael W. Cresswell, Michael Gaitan, Richard A. Allen, Loren W. Linholm
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Volume
4
Conference Dates
March 18-20, 1991
Conference Location
Kyoto, 1, JA

Citation

Cresswell, M. , Gaitan, M. , Allen, R. and Linholm, L. (1991), A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances, Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA (Accessed June 12, 2024)

Issues

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Created December 30, 1991, Updated October 12, 2021