TY  - CONF
AU  - Michael Cresswell
AU  - Michael Gaitan
AU  - Richard Allen
AU  - Loren Linholm
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA
DA  - 1991-12-31 00:12:00
LA  - en
M1  - 4
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA
PY  - 1991
TI  - A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances
ER  -