@conference{795586,
  author = {Michael Cresswell and Michael Gaitan and Richard Allen and Loren Linholm},
  title = {A Modified Sliding Wire Potentiometer Test Structure for Mapping Nanometer-Level Distances},
  year = {1991},
  number = {4},
  month = {1991-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA},
  language = {en},
}