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Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies

Published

Author(s)

Richard A. Allen, P. Troccolo, James C. OwenI II, James E. Potzick, Michael T. Postek, Loren W. Linholm
Proceedings Title
Proceedings of the SPIE
Conference Location
, USA
Conference Title
SPIE - The International Society for Optical Engineering

Citation

Allen, R. , Troccolo, P. , OwenI II, J. , Potzick, J. , Postek, M. and Linholm, L. (1993), Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies, Proceedings of the SPIE, , USA (Accessed April 20, 2024)
Created August 31, 1993, Updated October 12, 2021