Allen, R.
, Troccolo, P.
, OwenI II, J.
, Potzick, J.
, Postek, M.
and Linholm, L.
(1993),
Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies, Proceedings of the SPIE, , USA
(Accessed December 15, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies
Published
Author(s)
, P. Troccolo, , , ,
Proceedings Title
Proceedings of the SPIE
Conference Location
, USA
Conference Title
SPIE - The International Society for Optical Engineering
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created August 31, 1993, Updated October 12, 2021