Allen, R.
, Troccolo, P.
, OwenI II, J.
, Potzick, J.
, Postek, M.
and Linholm, L.
(1993),
Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies, Proceedings of the SPIE, , USA
(Accessed May 8, 2024)
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Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies
Published
Author(s)
, P. Troccolo, , , ,
Proceedings Title
Proceedings of the SPIE
Conference Location
, USA
Conference Title
SPIE - The International Society for Optical Engineering
Pub Type
Conferences
Citation
Created August 31, 1993, Updated October 12, 2021