TY  - CONF
AU  - Richard Allen
AU  - P. Troccolo
AU  - James OwenI II
AU  - James Potzick
AU  - Michael Postek
AU  - Loren Linholm
C2  - Proceedings of the SPIE, , USA
DA  - 1993-09-01 00:09:00
LA  - en
PB  - Proceedings of the SPIE, , USA
PY  - 1993
TI  - Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies
ER  -