@conference{765936,
  author = {Richard Allen and P. Troccolo and James OwenI II and James Potzick and Michael Postek and Loren Linholm},
  title = {Comparisons of Measured Linewidths of Sub-Micrometer Lines Using Optical, Electrical, and SEM Metrologies},
  year = {1993},
  month = {1993-09-01 00:09:00},
  publisher = {Proceedings of the SPIE, , USA},
  language = {en},
}