Jones, M.
, Roberts, J.
, Hood, C.
, Cresswell, M.
and Allen, R.
(1991),
Test Chip for the Evaluation of Surface Diffusion Phenomena in Sputtered Aluminum Planarization Processes, Proc., IEEE International Conference on Microelectronic Test Structures, Kyoto, 1, JA
(Accessed December 2, 2024)
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Test Chip for the Evaluation of Surface Diffusion Phenomena in Sputtered Aluminum Planarization Processes
Published
Author(s)
M. A. Jones, , , ,
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Volume
4
Conference Dates
March 18-20, 1991
Conference Location
Kyoto, 1, JA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1991, Updated October 12, 2021