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Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology

Published

Author(s)

Richard A. Allen, Michael W. Cresswell
Citation
Solid-State Electronics
Volume
35
Issue
3

Citation

Allen, R. and Cresswell, M. (1992), Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology, Solid-State Electronics (Accessed April 17, 2024)
Created December 30, 1992, Updated October 12, 2021