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Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology
Published
Author(s)
Richard A. Allen, Michael W. Cresswell
Citation
Solid-State Electronics
Volume
35
Issue
3
Pub Type
Journals
Citation
Allen, R.
and Cresswell, M.
(1992),
Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology, Solid-State Electronics
(Accessed September 21, 2023)