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PUBLICATIONS

Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology

Published

Author(s)

Richard A. Allen, Michael W. Cresswell
Citation
Solid-State Electronics
Volume
35
Issue
3
Pub Type
Journals

Citation

Allen, R. and Cresswell, M. (1992), Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology, Solid-State Electronics (Accessed November 4, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1992, Updated October 12, 2021
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