TY  - JOUR
AU  - Richard Allen
AU  - Michael Cresswell
C2  - Solid-State Electronics
DA  - 1992-12-31 00:12:00
LA  - en
M1  - 35
PB  - Solid-State Electronics
PY  - 1992
TI  - Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology
ER  -