@article{776376,
  author = {Richard Allen and Michael Cresswell},
  title = {Elimination of Effects Due to Patterning Imperfections in Electrical Test Structures for Submicrometer Feature Metrology},
  year = {1992},
  number = {35},
  month = {1992-12-31 00:12:00},
  publisher = {Solid-State Electronics},
  language = {en},
}