Allen, R.
, Cresswell, M.
, Hood, C.
and Linholm, L.
(1992),
Voltage-Dividing Potentiometer Enhancements for High-Precision Feature Placement Metrology, Proc., IEEE International Conference on Microelectronic Test Structures, San Diego, CA, USA
(Accessed January 19, 2025)
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Voltage-Dividing Potentiometer Enhancements for High-Precision Feature Placement Metrology
Published
Author(s)
, , ,
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Volume
5
Issue
158
Conference Dates
March 16-19, 1992
Conference Location
San Diego, CA, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 30, 1992, Updated October 12, 2021