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Voltage-Dividing Potentiometer Enhancements for High-Precision Feature Placement Metrology

Published

Author(s)

Richard A. Allen, Michael W. Cresswell, Colleen E. Hood, Loren W. Linholm
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Volume
5
Issue
158
Conference Dates
March 16-19, 1992
Conference Location
San Diego, CA, USA

Citation

Allen, R. , Cresswell, M. , Hood, C. and Linholm, L. (1992), Voltage-Dividing Potentiometer Enhancements for High-Precision Feature Placement Metrology, Proc., IEEE International Conference on Microelectronic Test Structures, San Diego, CA, USA (Accessed April 22, 2024)
Created December 30, 1992, Updated October 12, 2021