@conference{765671,
  author = {Richard Allen and Michael Cresswell and Colleen Hood and Loren Linholm},
  title = {Voltage-Dividing Potentiometer Enhancements for High-Precision Feature Placement Metrology},
  year = {1992},
  number = {5},
  month = {1992-12-31 00:12:00},
  publisher = {Proc., IEEE International Conference on Microelectronic Test Structures, San Diego, CA, USA},
  language = {en},
}