TY  - CONF
AU  - Richard Allen
AU  - Michael Cresswell
AU  - Colleen Hood
AU  - Loren Linholm
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, San Diego, CA, USA
DA  - 1992-12-31 00:12:00
LA  - en
M1  - 5
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, San Diego, CA, USA
PY  - 1992
TI  - Voltage-Dividing Potentiometer Enhancements for High-Precision Feature Placement Metrology
ER  -