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PUBLICATIONS

CMOS Process Monitor

Published

Author(s)

M. G. Buehler, Loren W. Linholm, V. C. Tyree, Richard A. Allen, B. R. Blaes, K. A. Hicks, G. A. Jennings
Proceedings Title
Proc., IEEE International Conference on Microelectronic Test Structures
Issue
6
Conference Dates
February 22-23, 1988
Conference Location
Long Beach, CA, USA
Pub Type
Conferences

Citation

Buehler, M. , Linholm, L. , Tyree, V. , Allen, R. , Blaes, B. , Hicks, K. and Jennings, G. (1988), CMOS Process Monitor, Proc., IEEE International Conference on Microelectronic Test Structures, Long Beach, CA, USA (Accessed December 5, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 30, 1988, Updated October 12, 2021