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A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps

Published

Author(s)

Richard A. Allen, Michael W. Cresswell, Laurence M. Buck
Citation
IEEE Electron Device Letters
Volume
13
Issue
6

Citation

Allen, R. , Cresswell, M. and Buck, L. (1992), A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps, IEEE Electron Device Letters (Accessed June 13, 2024)

Issues

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Created May 31, 1992, Updated October 12, 2021