@article{767701,
  author = {Richard Allen and Michael Cresswell and Laurence Buck},
  title = {A New Test Structure for the Electrical Measurement of the Width of Short Features with Arbitrarily Wide Voltage Taps},
  year = {1992},
  number = {13},
  month = {1992-06-01 00:06:00},
  publisher = {IEEE Electron Device Letters},
  language = {en},
}