Allen, R.
and Schuster, C.
(1993),
An Electrical Test Structure for Improved Measurement of Feature Placement and Overlay in Integrated Circuit Fabrication Processes, Proc., Government Microcircuit Applications Conference (GOMAC) 1993, New Orleans, LA, USA
(Accessed April 23, 2024)
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An Electrical Test Structure for Improved Measurement of Feature Placement and Overlay in Integrated Circuit Fabrication Processes
Published
Author(s)
, C. E. Schuster
Proceedings Title
Proc., Government Microcircuit Applications Conference (GOMAC) 1993
Issue
158
Conference Dates
November 1-5, 1993
Conference Location
New Orleans, LA, USA
Pub Type
Conferences
Citation
Created December 30, 1993, Updated October 12, 2021