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An Electrical Test Structure for Improved Measurement of Feature Placement and Overlay in Integrated Circuit Fabrication Processes

Published

Author(s)

Richard A. Allen, C. E. Schuster
Proceedings Title
Proc., Government Microcircuit Applications Conference (GOMAC) 1993
Issue
158
Conference Dates
November 1-5, 1993
Conference Location
New Orleans, LA, USA

Citation

Allen, R. and Schuster, C. (1993), An Electrical Test Structure for Improved Measurement of Feature Placement and Overlay in Integrated Circuit Fabrication Processes, Proc., Government Microcircuit Applications Conference (GOMAC) 1993, New Orleans, LA, USA (Accessed April 16, 2024)
Created December 30, 1993, Updated October 12, 2021